摘要：

通过对集成电路工厂废水种类、成分和原有废水处理工艺及原理的分析,以及对废水处理系统投入运行以来在工艺、设备、控制等方面存在诸多问题的研究,经过比较和分析,采用日本富士化水公司开发的用于处理半导体工业废水的专利技术——Heldy-F法,并对原有废水处理工艺进行了技术改造,改造后系统运行稳定,出水水质达到国家标准,运行成本降低,取得了良好的效果。

关键词: 集成电路, 含氟废水, 电镀废水

Abstract:

Based on the various kinds of wastewater, components and the technology and principle of the original wastewater treatment in an integrated circuit factory, the researches on the problems of technology, equipment and control in the wastewater treatment system since putting into action have been carried on. After comparison and analysis, the Japanese patent technique, Heldy-F, developed by Jujikasui Engineering Co. to treat semi-conductor industrial wastewater has been used for the technical reform in the original wastewater treatment. After the reform the system runs stably. Through monitoring the wastewater treatment efficiency and calculating the running cost, the wastewater discharge is steady, reaching the national standard and the running cost gets lower, obtaining excellent result.

Key words: integrated circuit, fluorine-containing wastewater, electroplating wastewater

中图分类号: 

• X703.1