Ultra-pure water manufacturing technology of the semiconductor industry
Xu Dehong
INDUSTRIAL WATER TREATMENT . 2010, (5): 90 -92 .  DOI: 10.11894/1005-829x.2010.30.(05).90

  • Governing Body / Sponsor: CNOOC Tianjin Chemical Research and Design Institute Co., Ltd
    Publisher: Editorial Office of Industrial Water Treatment
    ISSN　1005-829X
    CN　12-1087/TQ
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